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S 7800 CD-SEMversus.496 PSL Wafer

Hitachi S 7800 CD-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
S 7800 CD-SEMHitachi
.496 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 7800 CD-SEMKLA .496 PSL Wafer
Specifications
ConfigurationRefurbished[1]NIST Traceable[2]
Wafer size—8 inch[2]
Traceability—NIST Traceable[2]
Compatible systems—Capable on Surfscan 6xy0 and SP1[2]
Category—Metrology & Inspection[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com