Comparison ledger
Hitachi S 4700 FE-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 4700 FE-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 4700 | KLA .496 PSL Wafer |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Power | 4 kVA[1] | — |
| Frequency | 60 Hz[1] | — |
| Configuration | Windows NT 4.0[2] | NIST Traceable[6] |
| Wafer size | 4 inch[5] | 8 inch[6] |
| Control system | Windows NT 4.0[2] | — |
| Accessories | Oxford 7200 EDS[2] | — |
| Vintage | 1997[5] | — |
| OEM | Hitachi[5] | — |
| Model | S 4700[5] | — |
| Tool type | Field Emission Scanning Electron Microscope (FE-SEM)[5] | — |
| Included accessory | Oxford 7200 EDS[2] | — |
| Control platform | Windows NT 4.0[2] | — |
| Power/configuration | 1 Phase - 4 kVA - 60 Hz[1] | — |
| Traceability | — | NIST Traceable[6] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[6] |
| Category | — | Metrology & Inspection[7] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →