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CG 4000 CD-SEMversus.496 PSL Wafer

Hitachi CG 4000 CD-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
CG 4000 CD-SEMHitachi
.496 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi CG 4000 CD-SEMKLA .496 PSL Wafer
Specifications
ConfigurationGun Tip Replacement Only inc/ Parts[1]NIST Traceable[3]
Wafer size12 inch[2]8 inch[3]
Traceability—NIST Traceable[3]
Compatible systems—Capable on Surfscan 6xy0 and SP1[3]
Category—Metrology & Inspection[4]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com