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Comparison ledger

MI108versus0035235-003 MMD Head

Gaertner MI108, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MI108Gaertner
OEMGaertnerKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyGaertner MI108KLA 0035235-003 MMD Head
Specifications
Instrument typeLight-sectioning microscope[1]—
ModelMI108[1]0035235-003[2]
ConceptSchmaltz concept[1]—
Light beam angle45°[1]—
Micrometer drum graduation0.00002 inch per division (20 millionths)[1]—
Objective magnification3.48X[1]—
Eyepiece magnification10X[1]—
Total magnification34.8X[1]—
Optical working distance41.2 mm[1]—
Standard equipmentBase, filtered light source, adjustable slit, filar micrometer eyepiece with external revolution counter, x-y positioning stage with .001 reading micrometer thimbles, fixed angular mount, vertical positioning stage[1]—
Configuration—TSTD PCB ASSY, MMD MEAS HEAD[2]
Make—KLA[2]
Part Description—TSTD PCB ASSY, MMD MEAS HEAD[2]
Compatible System—KLA AIT-XP[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing