Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Edwards iH 1000 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | iH 1000 DryEdwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1990– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Edwards iH 1000 Dry |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | iH 1000[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Manufacturer | — | Edwards[3] |
| Product type | — | Dry pump[4] |
| Inlet connection | — | ISO 100[5] |
| Outlet connection | — | KF 40[5] |
| Pumping speed | — | 560 cfm[5] |
| Ultimate pressure | — | 1.5x10-3 Torr[5] |
| Motor | — | 3 Phase, 208V, 50/60Hz[4] |
| Weight | — | 948 lbs[4] |
| Voltage / frequency | — | 200-208 V, 50/60 Hz[5] |
| Power input | — | 3.5 kW[5] |
| Rated motor power | — | 5.1 kW[5] |
| Oil capacity | — | 1.48 l[5] |
| Dimensions | — | 909 x 839 x 390 mm[4] |