Waferpedia

YES

R1

LegacyWet Processing / CleanYES R1 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The YES-R1 is a bench-top plasma cleaner manufactured by Yield Engineering Systems. The YES-R1 uses a low-pressure gas plasma to remove organic contamination and to surface-activate parts and substrates. The YES-R1 is rated for 120 V, 60 Hz, 1.4 A, 175 W and supports argon and oxygen process gases.[1]

R1 — web.archive.org
Fig. 01R1web.archive.org[2]

Power

120 V, 60 Hz, 1.4 A, 175 W[1]

Gas delivery

Ar or O2[3]

What it is

The YES-R1 is a bench-top plasma cleaner used in wet processing and cleanroom workflows. The YES-R1 is a Yield Engineering Systems plasma cleaner.[1][3]

How it works

Plasma cleaners use an ionized gas at low pressure to remove residual organics and thin oxides from sample surfaces. The YES-R1 uses argon or oxygen gas in its plasma cleaning process.[3]

What can it run?

Process applications and technology nodes documented for this tool.

  • Lead frame plasma cleaning

What do the numbers mean?

Power & electrical2

Input power / rating
120 V, 60 Hz, 1.4 A, 175 W[1]
Accurate?
Plasma power source
Plasma-Therm PE-1000, ~1 kW, ~50 kHz, 115 VAC[1]
Accurate?

Vacuum & pumping1

Vacuum pump
Fisher Scientific Maxima C Plus Model M2C, KF-16 inlet[1]
Accurate?

Wafer handling1

Maximum substrate size
12 inch[3]
Accurate?

Gas & chemistry1

Process gases
Ar or O2[3]
Accurate?

Control & software1

Controller
Y.E.S. ‘Lark’ Logical Sequencer[1]
Accurate?

Configuration & options5

Plasma clean benchmark
5 minute Argon plasma clean[2]
Accurate?
Referenced use
Industry standard for 15 years[2]
Accurate?
Matching network
Advanced Energy LM-5K manual transformer[1]
Accurate?
Chamber temperature range
25–80 °C (typical, from plasma heat)[3]
Accurate?
Sample size range
Small pieces up to 12 in x 12 in x 4 in[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
R3A-LMC——The source states it is specifically designed for fast, uniform cleaning of lead frames and carrier borne devices loaded into one or two open-sided magazines, with parallel plate design, three plasma modes, two plasma gas inputs, and a back-fill gas input.web.archive.org[2]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Input power / rating120 V, 60 Hz, 1.4 A, 175 W[1]
  • Plasma power sourcePlasma-Therm PE-1000, ~1 kW, ~50 kHz, 115 VAC[1]
  • Vacuum pumpFisher Scientific Maxima C Plus Model M2C, KF-16 inlet[1]
  • Process gasesAr or O2[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What does the YES-R1 remove from samples?

The YES-R1 removes residual organics and thin oxides from samples.[3]

What is the maximum substrate size for the YES-R1?

The maximum substrate size is twelve inches.[3]

Not publicly documented

The following facts about the R1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the R1 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the R1 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the R1 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the R1 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the R1 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nfc.arizona.edu — nfc.arizona.edunfc.arizona.edu
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]nnci.net — nnci.netnnci.net
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Last updated Sep 22, 2026.

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