YES
CV100PL
The YES CV100PL is a single wafer resist stripper. The YES CV100PL is a compact, fully automated downstream plasma stripper. The YES CV100PL is designed for 2 to 6 inch wafers.[1][2][3]
What it is
How it works
The YES CV100PL supports both stripping and descum use modes, and the system can switch between those modes by changing a front-panel control.[2]
Where it fits in the process flow
The YES CV100PL is used for wafer stripping, plasma etching, and descumming.[2]
Applications
The YES CV100PL is used for wafer stripping and descumming on wafers from two to six inches in size.[2][4]
The YES CV100PL is also used for plasma etching and plasma stripping.[2][4]
- wafer stripping
- descum
- plasma etching
- plasma stripping
- plasma descumming
What do the numbers mean?
Wafer handling3
Control & software1
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size range does the YES CV100PL support?
The YES CV100PL is designed for wafers from two to six inches in size.[2]
What type of control system does the YES CV100PL use?
The YES CV100PL uses a touchscreen-interfaced PLC controller.[2][4]
Not publicly documented
The following facts about the CV100PL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CV100PL are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CV100PL are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CV100PL are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CV100PL are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CV100PL is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]YES CV100PL family | Waferpedia — waferpedia.comwaferpedia.com
- [4]CV100PL — YES | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
