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Veeco

K 465 GaN MOCVD

DepositionVeeco K 465 GaN MOCVD family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Veeco K 465 GaN MOCVD is a metal organic chemical vapor deposition system for GaN. The K 465 GaN MOCVD uses a K465 GaN Turbo disk. The K 465 GaN MOCVD operates on a 3 phase, 5 wire, 380 Vac, 280 A, 50/60 Hz power supply.[1][2]

K 465 GaN MOCVD — Inventory photo
Fig. 01K 465 GaN MOCVDInventory photo[1]

Power

3 Phase, 5 Wire[1]

Vacuum

K465 GaN Turbo disk[1]

What it is

The Veeco K 465 is a GaN MOCVD system for metal organic chemical vapor deposition.[1]

How it works

General reference — not yet source-verified

A metal organic chemical vapor deposition system delivers reactive precursor gases into a process chamber and forms thin semiconductor films on a heated substrate by chemical reaction at the surface.

A GaN MOCVD tool is used to grow gallium nitride epitaxial layers with controlled composition and thickness for device structures.

Where it fits in the process flow

General reference — not yet source-verified

A metal organic chemical vapor deposition system sits in the epitaxial growth stage of compound semiconductor fabrication.

Applications

General reference — not yet source-verified

GaN epitaxy supports compound semiconductor device fabrication for electronic and optoelectronic structures.

What do the numbers mean?

Power & electrical3

Phase
3 Phase, 5 Wire[1]
Accurate?
Voltage
380 Vac, 280 A, 50/60 Hz[1]
Accurate?
Power
3 Phase, 5 Wire, 380 Vac, 280 A, 50/60 Hz[1]
Accurate?

Vacuum & pumping1

K465 GaN Turbo disk[1]
Accurate?

Configuration & options2

Process
GaN MOCVD[1]
Accurate?
Vintage
2010 (asset 151584), 2010 (asset 151583), 2010 (asset 151582), 2009 (asset 151581), 2009 (asset 151580)[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationK465 GaN Turbo disk[1]
  • Phase3 Phase, 5 Wire[1]
  • Voltage380 Vac, 280 A, 50/60 Hz[1]
  • Power3 Phase, 5 Wire, 380 Vac, 280 A, 50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of reactor does the Veeco K 465 use?

The Veeco K 465 is equipped with a K465 GaN Turbo disk reactor.[1][3][4][2][5]

Not publicly documented

The following facts about the K 465 GaN MOCVD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the K 465 GaN MOCVD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the K 465 GaN MOCVD are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the K 465 GaN MOCVD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the K 465 GaN MOCVD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the K 465 GaN MOCVD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Equipment inventory listing
  6. [6]VEECO - Solutions for a nanoscale world — veeco.com (Jan 26, 2008)web.archive.org
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Last updated Oct 8, 2026.

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