Waferpedia

Varian

911-5039

Varian 911-5039 family
Research Quality: 30% complete

The Varian 911-5039 is a 60L ion pump with magnet and heat shields. The Varian 911-5039 is rated at 100V and 500W. The Varian 911-5039 is intended for use with Hitachi SEM S-4200 and S-4500 instruments.[1][2]

911-5039 — Inventory photo
Fig. 01911-5039Inventory photo[1]

Power

With Heat Shields 100V, 500W[1]

Vacuum

60L Ion Pump w/ Magnet[1]

What is it?

Varian 911-5039 is a 60L ion pump with magnet and heat shields, rated at 100V and 500W.

What do the numbers mean?

Power & electrical2

With Heat Shields 100V, 500W[1]
Accurate?
Voltage
100V[1]
Accurate?

Vacuum & pumping2

60L Ion Pump w/ Magnet[1]
Accurate?
Type
60L Ion Pump w/ Magnet[1]
Accurate?

Configuration & options5

For Hitachi SEM S-4200, S-4500[1]
Accurate?
In good working condition[1]
Accurate?
With Heat Shields[1]
Accurate?
Power
500W[1]
Accurate?
Intended Use
For Hitachi SEM S-4200, S-4500[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration60L Ion Pump w/ Magnet[1]
  • ConfigurationWith Heat Shields 100V, 500W[1]
  • Type60L Ion Pump w/ Magnet[1]
  • Voltage100V[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the pumping speed of the Varian 911-5039?

The Varian 911-5039 is a 60-liter-per-second ion pump.[1][2]

Which scanning electron microscopes is the Varian 911-5039 compatible with?

The Varian 911-5039 is designed for use with Hitachi S-4200 and S-4500 scanning electron microscopes.[1][2]

Not publicly documented

The following facts about the 911-5039 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 911-5039 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 911-5039 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 911-5039 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 911-5039 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 911-5039 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]911-5039 — Varian | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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