Waferpedia

Ulvac

Enviro II

Ulvac Enviro II family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

UlvacEnviro II
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What it is

The Ulvac Enviro II is a plasma asher or strip system used in semiconductor processing.[2]

Applications

The Enviro II is used for stripping and ashing work in semiconductor manufacturing.[2]

What do the numbers mean?

Power & electrical1

System type
Dual chamber advanced RF strip system[3]
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Wafer handling1

Wafer size
200mm (8")[3]
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Configuration & options5

Parts unit[1]
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Make
Ulvac[2]
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Model
Enviro II[2]
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Date of manufacture
03/27/2009[3]
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Input
3Ø, 208VAC, 50/60Hz, 86A[3]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • System typeDual chamber advanced RF strip system[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Ulvac Enviro II?

The Ulvac Enviro II is a plasma asher or strip system.[2]

Not publicly documented

The following facts about the Enviro II are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Enviro II are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Enviro II are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Enviro II are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Enviro II are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Enviro II is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
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Last updated Oct 10, 2026.

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