Ultratech
XLS 7500
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Ultratech XLS 7500 is an i-line stepper used for photolithography. The XLS 7500 can achieve a resolution of 0.50 microns. The XLS 7500 was ordered for the manufacture of surface acoustic wave (SAW) and microelectromechanical systems (MEMS) devices.[1]
What it is
General reference — not yet source-verifiedThe XLS 7500 is a photolithography stepper, a class of machine that projects the image of a reticle onto a photosensitive-coated wafer in a step-and-repeat fashion. Steppers are used to define the circuit patterns of semiconductor devices and microsystems.
What do the numbers mean?
Optics & imaging1
Configuration & options1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What resolution can the Ultratech XLS 7500 achieve?
The XLS 7500 can achieve a resolution of 0.50 microns.[1]
What are the primary applications of the XLS 7500?
The XLS 7500 is used for manufacturing SAW devices, MEMS, GaAs circuits, communications components, power ICs, logic devices, micromachining, and automotive electronics.[1]
Not publicly documented
The following facts about the XLS 7500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the XLS 7500 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XLS 7500 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the XLS 7500 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the XLS 7500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the XLS 7500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]compoundsemiconductor.net — compoundsemiconductor.netcompoundsemiconductor.net
- [2]Equipment inventory listing
Last updated Sep 24, 2026.
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