Tokyo Electron
Unity II E 855 II Dry
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Unity II E 855 II Dry is a dry etcher from Tokyo Electron. The Unity II E 855 II Dry processes 8-inch wafers.[1][2]
What it is
The model designation is Unity II E 855 II.[2]
How it works
General reference — not yet source-verifiedA dry etcher removes material from a wafer with a plasma-based process rather than with liquid chemistry.
Dry etching generally uses a gas environment and electric fields to generate reactive species that transfer pattern information from a mask into the exposed film or substrate.
Where it fits in the process flow
General reference — not yet source-verifiedA dry etcher sits in the pattern-transfer portion of the wafer fabrication flow after lithography has defined the feature pattern on a masking layer.
The etch step is followed by mask removal, cleaning, inspection, and later process modules that build or finish the device structure.
Applications
General reference — not yet source-verifiedDry etchers are used for anisotropic pattern transfer in semiconductor manufacturing.
Dry etching is used to form features in thin films, dielectric layers, and other patterned materials where directional material removal is required.
What do the numbers mean?
Wafer handling1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Unity II E 855 II Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Unity II E 855 II Dry are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Unity II E 855 II Dry are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Unity II E 855 II Dry are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Unity II E 855 II Dry are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Unity II E 855 II Dry is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Unity II E 855 II Dry — Tokyo Electron | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 8, 2026.
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