Tokyo Electron
Unity II 85 DP Dry
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Tel Unity II 85 DP is a dry etcher for 8-inch wafers.[1]
What it is
The Unity II 85 DP is a dry etch system. The Unity II 85 DP is made by Tel. The Unity II 85 DP is configured for wafers with an 8-inch diameter.[1]
How it works
General reference — not yet source-verifiedDry etchers process wafers inside a vacuum chamber. A process gas is introduced into the chamber and excited into a plasma by radio-frequency power. The plasma contains ions and reactive radicals that attack exposed film material on the wafer. Etching can occur through chemical reactions, physical ion bombardment, or a combination of both. Process parameters such as gas composition, pressure, and power determine the etch rate and anisotropy.
Where it fits in the process flow
General reference — not yet source-verifiedEtch is used after photolithography to transfer a pattern into the underlying film. The patterned photoresist covers areas that should remain; the dry etcher removes material in the open areas. Following the etch step, the resist is stripped and the wafer is cleaned before further processing.
Applications
General reference — not yet source-verifiedDry etch tools pattern dielectric films, semiconductor materials, and conductive layers. Common applications include gate structuring, contact and via formation, and interconnect patterning. Dry etching provides anisotropic profiles for high-fidelity pattern transfer in integrated-circuit fabrication.
What do the numbers mean?
Wafer handling1
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Unity II 85 DP Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Unity II 85 DP Dry are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Unity II 85 DP Dry are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Unity II 85 DP Dry are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Unity II 85 DP Dry are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Unity II 85 DP Dry is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Oct 1, 2026.
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