Tokyo Electron
TE 8401 Poly
The Tokyo Electron TE 8401 Poly is a single-chamber poly etcher. The Tokyo Electron TE 8401 Poly has two pumps. The Tokyo Electron TE 8401 Poly uses gas lines for He, O2, CF4, HBr, and CL2.[1][2][3]
What it is
How it works
Where it fits in the process flow
The TE 8401 family is a dry etcher for eight-inch wafers.[3]
Applications
What do the numbers mean?
Vacuum & pumping2
- Pump (2)[1]
Wafer handling1
Gas & chemistry2
Configuration & options6
- Single chamber[1]
Vintage & configurations
Documented models & variants
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the TE 8401 Poly are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TE 8401 Poly are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the TE 8401 Poly are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TE 8401 Poly are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TE 8401 Poly is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TE 8401 Poly are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]TE 8401 Poly — Tokyo Electron | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 6, 2026.
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