Tokyo Electron
Tactras RLSA Polysilicon
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedThe Tactras RLSA is a dry etch tool used in semiconductor front-end fabrication. The machine removes polysilicon films from a wafer surface by plasma processing. Each wafer is processed individually in a vacuum chamber.
How it works
General reference — not yet source-verifiedPlasma etching uses a reactive gas mixture inside a low-pressure vacuum chamber. Microwave or radio-frequency power ionizes the gas into a plasma. The plasma reacts with the exposed film on the wafer surface. Charged particles in the plasma also bombard the wafer to remove material directionally.
Where it fits in the process flow
General reference — not yet source-verifiedThe Tactras RLSA is used in the front-end portion of the semiconductor manufacturing line. The polysilicon etch step follows a photolithography step that patterns a resist layer. The etch step removes polysilicon material in the regions not covered by the resist mask. After etching, downstream steps strip the remaining resist and continue device fabrication.
Applications
General reference — not yet source-verifiedPolysilicon etching is used to define gate electrode structures in integrated circuits. The process is applied in the fabrication of both logic and memory devices. The Tactras RLSA is also used for other polysilicon-related structures formed during device production.
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Tactras RLSA Polysilicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Tactras RLSA Polysilicon are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Tactras RLSA Polysilicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Tactras RLSA Polysilicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Tactras RLSA Polysilicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Tactras RLSA Polysilicon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]fabsurplus.com — fabsurplus.comfabsurplus.com
- [3]Equipment inventory listing
Last updated Sep 24, 2026.
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