Tokyo Electron
Clean Track Mark 7
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
For the scrubber variant, the Mark 7 platform incorporates a vacuumless robotic transport system. The scrubber uses mechanical and vacuum chucks to clean both the top and back sides of the wafer. An automatic brush pressure controller regulates the cleaning force. Optional cleaning methods include high-pressure jet spray and megasonic cleaning.[3]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- not working
What do the numbers mean?
Wafer handling2
Configuration & options1
- not working[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SS-series | — | — | Stand-alone wafer scrubber system based on the CLEAN TRACK MARK 7 platform with features including vacuumless robotic transport, mechanical and vacuum chucks, automatic brush pressure controller, optional jet or megasonic cleaning. | web.archive.org[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Clean Track Mark 7 support?
The Mark 7 platform supports wafer sizes from 5 inch to 8 inch.[3]
What is the SS-series and what is it based on?
The SS-series is a stand-alone wafer scrubber system based on the CLEAN TRACK MARK 7 platform.[3]
Does the Mark 7 scrubber use a vacuum for wafer transport?
The SS-series scrubber uses a vacuumless robotic transport system.[3]
What cleaning methods are available on the SS-series scrubber?
The SS-series scrubber offers optional high-pressure jet spray or megasonic cleaning in addition to brush cleaning.[3]
What interfaces and compliance standards does the Mark 7 scrubber support?
The SS-series scrubber supports GEM host communication, SMIF interface, and compliance with S2-93 and CE mark.[3]
Not publicly documented
The following facts about the Clean Track Mark 7 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Clean Track Mark 7 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Clean Track Mark 7 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Clean Track Mark 7 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Clean Track Mark 7 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Clean Track Mark 7 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Equipment inventory listing
- [3]web.archive.org — tel.com (Apr 14, 2005)web.archive.org
Last updated Sep 25, 2026.
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