Tegal
Tegal 915
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Plate 01Tegal 915 plasma asher etcher descum semiconductor equipment
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What it is
The Tegal 915 is an etcher in the Tegal 9XX series of plasma etch systems.[1]
How it works
General reference — not yet source-verifiedA plasma is generated by applying radio-frequency power to a low-pressure process gas inside a vacuum chamber. The energized gas molecules dissociate into ions and radicals that interact with the substrate surface. Ions are accelerated toward the substrate by an electric field, providing anisotropic etching, while neutral radicals contribute isotropic chemical etching.
Where it fits in the process flow
General reference — not yet source-verifiedPlasma etching is performed after photolithographic patterning to transfer the mask pattern into an underlying film. The etched features define structures such as transistor gates, dielectric contacts, or metal interconnects in integrated circuits.
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Tegal 915 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Tegal 915 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Tegal 915 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Tegal 915 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Tegal 915 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Tegal 915 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]legacysemi.com — legacysemi.comlegacysemi.com
Last updated Oct 7, 2026.
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