Waferpedia

SUSS MicroTec

AS 8

SUSS MicroTec AS 8 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The SUSS AS8 (also AS 8) is a manual spray coater for high topographies, designed for R&D and low-volume production of substrates up to 200 mm.[1]

SUSS MicroTec logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The SUSS MicroTec AS 8 is a manual spray coater designed for research and development and low-volume production of substrates up to 200 mm wafers and square substrates up to 6-inch edge length.[1]

How it works

The AS 8 features a high-precision X/Y stage with dual spray nozzles and a separate solvent nozzle. The z-axis adjustment range is up to 45 mm, and the nozzle adjustment ranges from 67.5 mm to 107.5 mm. Spray axis velocities reach up to 500 mm/s with acceleration up to 9 m/s². Chuck rotation speeds are up to 1,000 rpm, and a heated chuck option is available.[1]

What do the numbers mean?

Wafer handling6

Substrate size (round)
up to 200 mm[1]
Accurate?
Substrate size (square)
up to 6" edge length[1]
Accurate?
Dual-nozzle substrate sizes
Ø150 mm, Ø200 mm[1]
Accurate?
Single-nozzle substrate sizes
Ø3", Ø100 mm, Ø150 mm, Ø200 mm[1]
Accurate?
Chuck maximum rotation speed
1,000 rpm[1]
Accurate?
Heated chuck
optional[1]
Accurate?

Configuration & options5

Z-axis adjustment range
up to 45 mm[1]
Accurate?
Nozzle adjustment range
67.5 mm to 107.5 mm[1]
Accurate?
Spray axis maximum velocity
500 mm/s[1]
Accurate?
Spray axis acceleration
up to 9 m/s²[1]
Accurate?
Splash-ring design
included[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the AS 8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AS 8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the AS 8 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the AS 8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the AS 8 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the AS 8 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]suss.com — suss.comsuss.com
  2. [2]Equipment inventory listing
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Last updated Sep 22, 2026.

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