Waferpedia

Strasbaugh

6 Y 2

CMPStrasbaugh 6 Y 2 family
Research Quality: 40% complete
Strasbaugh6 Y 2
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What it is

The Strasbaugh 6 Y 2 is a CMP polisher.[2][3]

The Strasbaugh 6 Y 2 has two stations and a 16 inch capacity.[1][2][3]

How it works

The Strasbaugh 6 Y 2 has variable-speed spindle and overarm controls.[2][3]

The Strasbaugh 6 Y 2 uses round aluminum pans and a 3/4 HP variable speed pulley drive.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

CMP polishers sit in the surface-finishing stage of semiconductor processing.

CMP tools are used after earlier patterning or deposition steps when planarization or surface conditioning is needed before later process steps.

Applications

The Strasbaugh 6 Y 2 has 220V, single-phase, 12 amp electrical requirements.[1][2]

What do the numbers mean?

Power & electrical2

Voltage
220V, 1 PH, 12 amp[1]
Accurate?
Electrical requirements
220V, 1 PH, 12 amp[1]
Accurate?

Configuration & options15

2 Stations[1]
Accurate?
16 inch capacity[1]
Accurate?
0-100 RPM Spindle[1]
Accurate?
0-100 RPM Overarm[1]
Accurate?
3/4 HP Variable Speed Pulley Drive[1]
Accurate?
Round Aluminum Pans[1]
Accurate?
Refurbished[1]
Accurate?
Category
CMP[2]
Accurate?
Tool type
Polisher[1]
Accurate?
Stations
2[1]
Accurate?
Capacity
16 inch[1]
Accurate?
Spindle speed
0-100 RPM[1]
Accurate?
Overarm speed
0-100 RPM[1]
Accurate?
Drive
3/4 HP Variable Speed Pulley Drive[1]
Accurate?
Pans
Round Aluminum Pans[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage220V, 1 PH, 12 amp[1]
  • Electrical requirements220V, 1 PH, 12 amp[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

How many stations does the Strasbaugh 6 Y 2 have?

The Strasbaugh 6 Y 2 has 2 stations.[1][2][3]

What is the capacity of the Strasbaugh 6 Y 2?

The Strasbaugh 6 Y 2 has 16 inch capacity.[1][2][3]

What spindle speed range is given for the Strasbaugh 6 Y 2?

The Strasbaugh 6 Y 2 has a 0-100 RPM spindle.[1][2]

What overarm speed range is given for the Strasbaugh 6 Y 2?

The Strasbaugh 6 Y 2 has a 0-100 RPM overarm.[1][2]

What electrical requirement is given for the Strasbaugh 6 Y 2?

The Strasbaugh 6 Y 2 requires 220V, single-phase power at 12 amp.[1][2]

Not publicly documented

The following facts about the 6 Y 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6 Y 2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 6 Y 2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 6 Y 2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 6 Y 2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 6 Y 2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Strasbaugh 6 Y 2 family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 4, 2026.

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