SCREEN

SU 3100 Wafer

Wet Processing / Clean SCREEN SU 3100 Wafer family

Research Quality: 30% complete

SU 3100 Wafer — Inventory photo — Fig. 01SU 3100 WaferInventory photo^[1]

What is it?

The SCREEN SU 3100 is a wafer cleaner from SCREEN/DNS, configured with 8 chambers (8ch) and 4 FOUP load ports, and known to have specific documented failure modes.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Failure on Part: MPC2 Shutter Plate Rotation Motor – Alarm
Failure on Part: MPC8 Multi-Cup – Overall virtual axis positioning sensor abnormality

What do the numbers mean?

Configuration & options13

8ch^[1]; 4 FOUP^[1]
Status: Failure on Part: MPC2 Shutter Plate Rotation Motor – Alarm^[1]
Status: Failure on Part: MPC8 Multi-Cup – Overall virtual axis positioning sensor abnormality^[1]; No HDD^[1]; 8ch, 4 FOUP^[1]
Vintage: 2010^[1]
HDD Status: No HDD^[1]
Model: SU 3100^[1]
Make: SCREEN / DNS^[1]
Number of Chambers: 8^[1]
Number of FOUP Load Ports: 4^[1]
HDD: No HDD^[1]

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the make and model of this equipment?

The make is SCREEN / DNS and the model is SU 3100.^[1]^[6]

Not publicly documented

The following facts about the SU 3100 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 3100 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SU 3100 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU 3100 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SU 3100 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SU 3100 Wafer are on record.
Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]Inventory photo
[2]Inventory photo
[3]Inventory photo
[4]Inventory photo
[5]Inventory photo
[6]SU 3100 Wafer — SCREEN | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com