Waferpedia

Rigaku

XRF 3640

Rigaku XRF 3640 family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

RigakuXRF 3640
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What it is

The Rigaku XRF 3640 is a wafer disk analyzer made by Rigaku.[2]

Applications

The Rigaku XRF 3640 is used for wafer or disk analysis.[2]

The Rigaku XRF 3640 is used in x-ray fluorescence-based measurement workflows.[2]

What do the numbers mean?

Wafer handling4

Tool type
wafer disk analyzer[2]
Accurate?
Wafer handling
3 with Handler[2]
Accurate?
Wafer size
8 inch[2]
Accurate?
Handler included
Yes[2]
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Configuration & options4

Manufacturer
Rigaku[1]
Accurate?
Model
XRF 3640[1]
Accurate?
Technique
X-ray fluorescence[2]
Accurate?
Vintage
1995[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Rigaku XRF 3640?

The Rigaku XRF 3640 is a wafer or disk analyzer made by Rigaku.[2]

Not publicly documented

The following facts about the XRF 3640 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XRF 3640 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XRF 3640 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XRF 3640 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XRF 3640 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XRF 3640 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 8, 2026.

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