Plasma-Therm
Versaline VLN ICP
Wafer size
Brooks TM (Transfer Module) with four Wafer Manual Load Lock
Power
208V, 60 Hz, 3 phase[1]
Vacuum
No pumps or chiller included[1]
What it is
How it works
The Plasma-Therm Versaline VLN ICP has a single ICP chamber and a manual load lock for single or multiple wafers.[1][2]
The Plasma-Therm Versaline VLN ICP includes RF power delivery, gas flow control, pressure control, vacuum pumping, backside cooling, a chamber heater, and a Windows based operating system.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedPlasma etch tools sit in the pattern transfer part of semiconductor processing and act after lithography has defined features in a masking layer.
Plasma etch tools are used before downstream cleaning, inspection, and later process modules that follow feature transfer into the wafer.
Applications
What do the numbers mean?
Power & electrical6
- ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner[1]
- ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner[1]
- RF power supply 1
- ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner[1]
- RF power supply 2
- ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner[1]
Vacuum & pumping5
Wafer handling3
- Manual Load Lock for Single or Multiple Wafers[1]
Gas & chemistry4
Control & software4
Configuration & options10
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner[1]
- ConfigurationENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner[1]
- ConfigurationVAT PM5 Pressure Controller with Leybold Turbo pump[1]
- ConfigurationSeiko Seiki 1303CV Turbo Pump with Seiko Seiki SCU 750 controller[1]
- Configuration(5) MFCs-gas with Isolation, Process and By-pass valves[1]
- Voltage208V, 60 Hz, 3 phase[1]
- ConfigurationNo pumps or chiller included[1]
- Configuration(6) MFCs-gas with Isolation, Process and By-pass valves[2]
- RF power supply 1ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner[1]
- RF power supply 2ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner[1]
- Pressure controllerVAT PM5 Pressure Controller with Leybold Turbo pump[2]
- Turbo pumpSeiko Seiki 1303CV Turbo Pump with Seiko Seiki SCU 750 controller[2]
- Gas handling(5) MFCs-gas with Isolation, Process and By-pass valves[1]
- Gas handling(6) MFCs-gas with Isolation, Process and By-pass valves[2]
- Electrical208V, 60 Hz, 3 phase[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Versaline VLN ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Versaline VLN ICP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Versaline VLN ICP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Versaline VLN ICP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Versaline VLN ICP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Versaline VLN ICP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 7, 2026.
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