Plasma-Therm
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The Corial 200FA is a Plasma-Therm Corial brand product. The Corial 200FA is intended for R&D and low-volume production. The Corial 200FA is useful for pilot production and experimentation.[1]
The Plasma-Therm Corial 200FA is a plasma processing system in the Corial brand line. The Corial brand covers R&D and low-volume production tools. The Corial 200FA is among the Corial brand products named for pilot production and experimentation.[1]
Plasma processing equipment is used in semiconductor manufacturing to control the size, shape, and depth of features on silicon wafers. Plasma-Therm is a manufacturer of wafer-based plasma processing equipment with product coverage in etching, deposition, rapid thermal processing, and plasma dicing.[1]
The Corial 200FA is used for pilot production and experimentation. The Corial brand supports R&D and low-volume production use.[1]
Plasma-Therm serves semiconductor, compound semiconductor, and nanotechnology applications. The company also supports wireless, power device, MEMS, photonics, advanced packaging, and data storage markets.[1]
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The following facts about the Corial 200FA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Corial 200FA are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Corial 200FA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Corial 200FA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Corial 200FA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Corial 200FA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 2, 2026.