Pfeiffer
ATH1603M
The Pfeiffer ATH1603M is a magnetically levitated turbomolecular pump with a pumping speed of approximately 1,400–1,600 l/s for nitrogen. The ATH1603M achieves an ultimate pressure of up to 6×10⁻⁹ mbar and operates at 39,000 rpm. The ATH1603M is used as a secondary pump in vacuum systems, such as the Alliance-Concept EVA 451 thermal evaporator.[1][2]
What it is
How it works
The ATH1603M achieves an ultimate pressure as low as approximately 6 × 10⁻⁹ mbar, depending on the system configuration.[1]
The pump is water-cooled and requires an external controller; it does not include an integrated drive electronics unit.[1][3]
Complementary dry pumps used in the same system include the Pfeiffer ACP series for primary pumping.[2]
What can it run?
Process applications and technology nodes documented for this tool.
- Used in the pumping system of an evaporator for coating conductive layers
- Associated system is used to prepare non-conductive samples for e-beam exposure and avoid charging issues
What do the numbers mean?
Power & electrical3
Vacuum & pumping4
Wafer handling1
Control & software2
Dimensions & facilities1
Configuration & options10
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Y2662100 | — | — | — | lagerwerk.com[1] |
| Y2522100 | — | — | — | idealvac.com[5] |
| Y25231L0 | — | — | — | idealvac.com[6] |
| TE5231B1 | — | — | — | semiconductorspares.com[4] |
| ATH1603M (DN250) | — | — | Inlet flange DN250 ISO-F with protective grille, water-cooled, magnetic bearing | lagerwerk.com[1] |
| ATH1603M (DN200) with MAGPOWER controller | — | — | Inlet flange DN200 ISO-F, includes MAGPOWER controller (type 120917 Ed.A), water cooling, magnetic bearing | lagerwerk.com[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the ATH1603M are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATH1603M are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the ATH1603M are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ATH1603M are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ATH1603M is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ATH1603M are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]lagerwerk.com — lagerwerk.comlagerwerk.com
- [2]epfl.ch — epfl.chepfl.ch
- [3]lagerwerk.com — lagerwerk.comlagerwerk.com
- [4]semiconductorspares.com — semiconductorspares.comsemiconductorspares.com
- [5]idealvac.com — idealvac.comidealvac.com
- [6]idealvac.com — idealvac.comidealvac.com
Last updated Sep 30, 2026.
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