Ontrak
DSS 200 Integrated Circuit
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Ontrak DSS 200 is a double-sided PVA scrubber for cleaning wafers from 100mm to 200mm. The Ontrak DSS 200 is used for post-CMP cleaning, general cleaning, and silicon cleaning applications.[1][2][3]
What it is
How it works
The Ontrak DSS 200 features a double-sided PVA scrub with dual brush boxes, ammonia dispense, and an IR-assisted spin dry station. The system includes a universal load station (Series 1) or a 200mm ergonomic load station (Series 2), a robotic unload, a vertical unload station, and touchscreen controls. The Series 2 adds dark plastic covers to protect light-sensitive wafers.[1][2]
Where it fits in the process flow
Applications
What do the numbers mean?
Wafer handling3
Control & software2
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| DSS 200 Series 1 | — | — | Base variant; double-sided PVA scrubber for 100-200mm wafers. | axustech.com[1] |
| DSS 200 Series 2 | — | — | Offers throughput of 45-65 wafers per hour, dark plastic covers to protect light-sensitive wafers. | axustech.com[2] |
| DSS 200 Series 2 CE | — | — | Cleaning method: brush scrub; brush type: roller PVA; downforce control: yes; edge scrub: optional; megasonic: optional; drying: spin + heat lamp; NH4OH: yes; dHF: no; SC-1 pre-diluted: yes; SC-2: citric-based; backside chemical: yes; metal CMP cleans: yes; STI CMP cleans: yes; double contained process area: no. | entrepix.com[3] |
| DSS 200 Synergy | — | — | Cleaning method: brush scrub; brush type: roller PVA; downforce control: yes; edge scrub: optional; megasonic: optional; drying: spin + heat lamp; NH4OH: yes; dHF: yes; SC-1 pre-diluted: yes; SC-2: citric OR HCL-based; backside chemical: yes; metal CMP cleans: yes; STI CMP cleans: yes; double contained process area: yes. | entrepix.com[3] |
| DSS 200 Integra | — | — | Cleaning method: brush scrub; brush type: roller PVA; downforce control: yes; edge scrub: optional; megasonic: optional; drying: spin + heat lamp; NH4OH: yes; dHF: yes; SC-1 pre-diluted: yes; SC-2: citric OR HCL-based; backside chemical: yes; metal CMP cleans: yes; STI CMP cleans: yes; double contained process area: yes; integrated megasonic. | entrepix.com[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Ontrak DSS 200 support?
The Ontrak DSS 200 is designed to clean wafers from 100mm to 200mm in diameter.[1][3]
What is the throughput of the Ontrak DSS 200 Series 2?
Depending on the application, throughputs of 45-65 waers per hour are attainable.[2]
What cleaning methods does the Ontrak DSS 200 use?
The Ontrak DSS 200 uses double-sided PVA brush scrubing with ammonia disense and an IR-assisted spin dry station for drying.[1][2]
Does the Ontrak DSS 200 have any special features for light-sensitive wafers?
The Series 2 configuration includes dark plastic covers to protect light-sensitive wafers.[2]
Not publicly documented
The following facts about the DSS 200 Integrated Circuit are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DSS 200 Integrated Circuit are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the DSS 200 Integrated Circuit are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DSS 200 Integrated Circuit are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DSS 200 Integrated Circuit is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the DSS 200 Integrated Circuit are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]axustech.com — axustech.comaxustech.com
- [2]axustech.com — axustech.comaxustech.com
- [3]entrepix.com — entrepix.comentrepix.com
- [4]Equipment inventory listing
Last updated Sep 22, 2026.
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