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OAI

Model 2012

LithographyOAI Model 2012 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The OAI Model 2012 is a UV exposure system. The OAI Model 2012 is grouped with other OAI exposure systems in the UV Exposure Systems datasheet section.[1]

OAIModel 2012
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What it is

General reference — not yet source-verified

The OAI Model 2012 is a UV exposure system designed for photolithographic processes. UV exposure systems are a class of equipment used to transfer patterns from a photomask onto a photoresist-coated substrate. The Model 2012 is part of the product line offered by Optical Associates, Inc. (OAI), a manufacturer of lithography and UV measurement equipment.

How it works

General reference — not yet source-verified

UV exposure systems generally operate by projecting ultraviolet light through a photomask onto a substrate coated with a photosensitive material. The exposure causes a chemical change in the photoresist, allowing subsequent development steps to reveal the pattern. The OAI Model 2012 uses a controlled UV light source to achieve uniform exposure across the substrate.

Where it fits in the process flow

General reference — not yet source-verified

In semiconductor and microdevice fabrication, UV exposure systems are used in the photolithography step to define circuit features. The exposure step follows substrate cleaning and photoresist coating, and precedes development, etching, and stripping. The Model 2012 is applied in processes requiring reliable UV exposure for pattern transfer.

What do the numbers mean?

Optics & imaging2

Product line
UV Exposure Systems[1]
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Product type
UV Exposure System[1]
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Configuration & options1

Datasheet listing
OAI_Model 2012[1]
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What replaced it?

  • siblingOAI Model 32— Listed in the same UV Exposure Systems datasheet category as the OAI Model 32 on OAI's resources page.source[1]
  • siblingOAI Model 6020— Listed under 'UV Exposure Systems' datasheet section; sibling as a UV exposure system.source[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Model 2012 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Model 2012 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Model 2012 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Model 2012 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Model 2012 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Model 2012 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]oainet.com — oainet.comoainet.com
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Last updated Oct 11, 2026.

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