MPI
TS 3500 Automatic Wafer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The TS 3500 uses programmable chuck motion, programmable microscope motion, wafer pre-alignment, and cassette handling features to automate wafer loading and probing.[4]
The TS 3500 series supports wafer loading through manual trays, cassette-based loading, and WaferWallet options for automated handling.[3][4]
Where it fits in the process flow
Applications
What do the numbers mean?
Wafer handling1
Control & software1
Configuration & options17
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| TS3500-IFE | — | — | Fully automated probe station with IceFreeEnvironment; supports measurements down to -60°C; described as equivalent in features to TS3000-IFE with added fully-automated capability. | mpi-corporation.com[3] |
| TS3500-SE | — | — | Fully automated probe station with ShielDEnvironment; described as equivalent in features to TS3000-SE with added fully-automated capability. | mpi-corporation.com[3] |
| TS3500-SE with WaferWallet | — | — | TS3500-SE configuration with WaferWallet option. | mpi-corporation.com[3] |
| TS3500-SE with WaferWallet MAX | — | — | TS3500-SE configuration with WaferWallet MAX option. | mpi-corporation.com[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the TS 3500 Automatic Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TS 3500 Automatic Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the TS 3500 Automatic Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TS 3500 Automatic Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TS 3500 Automatic Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TS 3500 Automatic Wafer are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]mpi-corporation.com — mpi-corporation.commpi-corporation.com
- [4]https://www.mpi.com.tw/wp-content/uploads/ASTPDF/MPI-TS3500-Automated-Probe-System-Data-Sheet.pdf — mpi.com.twmpi.com.tw
- [5]https://www.mpi-corporation.com/wp-content/uploads/ASTPDF/MPI-TS3500-IFE-Automated-Probe-System-Data-Sheet.pdf — mpi-corporation.commpi-corporation.com
Last updated Oct 11, 2026.
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