Waferpedia

Micromanipulator

Wafer

Test & ProbeMicromanipulator Wafer family
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MicromanipulatorWafer
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What it is

General reference — not yet source-verified

The Micromanipulator Wafer is a wafer probing station used for electrical test and probe work on semiconductor wafers.

How it works

General reference — not yet source-verified

A wafer probe station positions a wafer under microscopes and probes so an operator can contact test points on the wafer surface.

A probe station commonly uses a precision stage, a chuck that holds the wafer, and manipulators that move probes into contact with pads or structures on the device.

Where it fits in the process flow

General reference — not yet source-verified

Wafer probing belongs in the wafer level test phase of semiconductor manufacturing before wafer dicing and packaging.

Wafer level probe stations are used for device characterization, parametric test, reliability work, and fault isolation on completed structures that remain on the wafer.

Applications

Wafer probe stations are used for wafer level submicron test head probing, failure analysis, device characterization, reliability testing, low current probing, high current probing, and RF and microwave probing.[2]

Wafer probe stations are also used for thin film probing, hot stage probing, MEMS testing and assembly, and optical device probing.[2]

What do the numbers mean?

Wafer handling3

Wafer size range
150 mm (6 inch) to 300 mm (12 inch)[2]
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Chuck
Kelvin chuck wiring[2]
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Thermal chuck
Integrated wiring and plumbing[2]
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Control & software1

Control
Front panel MicroTouch knobs, automatic functions keypad, optional joystick/remote pendant[2]
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Configuration & options7

with New Wave LCSII 532 System[1]
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Type
Manual probe station[2]
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Low Current/Low Noise
Ready[2]
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Base
Vibration dampened[2]
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Platen
Large area magnetic stainless steel[2]
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Microscope bridge
Heavy duty, motorized drive, 8-inch focus block[2]
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Upgradeable to
Semi-Automatic 9920[2]
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Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

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Not publicly documented

Field notes

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Frequently asked questions

What types of work are Micromanipulator probe stations used for?

Micromanipulator probe stations are used for failure analysis, fault isolation, emission microscopy, device characterization, reliability testing, copper interconnect reliability, low current probing, high current probing, thin film probing, hot stage probing, MEMS testing and assembly, and optical device probing.[2]

What wafer sizes does the 9020S probe station support?

The 9020S probe station supports wafer sizes from 150 mm to 300 mm.[2]

Not publicly documented

The following facts about the Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.org — micromanipulator.com (Mar 22, 2006)web.archive.org
  3. [3]Wafer (electronics) - Wikipedia — en.wikipedia.orgen.wikipedia.org
  4. [4]GCA 5X Operation Manual — cnfusers.cornell.educnfusers.cornell.edu
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Last updated Oct 1, 2026.

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