Waferpedia

Leybold

Turbovac 50 Turbo

Leybold Turbovac 50 Turbo family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Turbovac 50 Turbo — Inventory photo
Fig. 01Turbovac 50 TurboInventory photo[1]

Where it fits in the process flow

The Turbovac 50 has a maximum foreline pressure for nitrogen of 1 × 10⁻¹ mbar. The recommended forevacuum pump for this model is the TRIVAC D 2.5 E.[3]

Applications

The Turbovac 50 is used in applications that require a compact, clean high-vacuum source. Typical applications include leak detectors, mass spectrometers, electron beam microscopy, TV tube manufacturing, load locks, transfer chambers, and general high-vacuum chambers.[4]

What do the numbers mean?

Vacuum & pumping9

Pump Type
Turbomolecular pump with grease-lubricated bearings[2]
Accurate?
Ultimate pressure
< 5 x 10⁻⁸ mbar[3]
Accurate?
Power consumption at ultimate pressure
15 W[3]
Accurate?
Max. foreline pressure for N₂
1 x 10⁻¹ mbar (7.5 x 10⁻² Torr)[3]
Accurate?
Recommended foreline pump
TRIVAC D 2.5 E[3]
Accurate?
Pumping speed for N₂ (DN 40 inlet)
33 l/s[3]
Accurate?
Pumping speed for N₂ (DN 63 inlet)
55 l/s[3]
Accurate?
Gas throughput for N₂ (DN 40 inlet)
0.90 mbar l/s[3]
Accurate?
Gas throughput for N₂ (DN 63 inlet)
1.00 mbar l/s[3]
Accurate?

Dimensions & facilities1

Weight
2.0 kg (4.4 lbs)[3]
Accurate?

Configuration & options8

Nominal rotation speed
72000 rpm[3]
Accurate?
Run-up time
2 min[3]
Accurate?
Max. power consumption
45 W[3]
Accurate?
Admissible ambient temperature
10 to 55 °C / 50 to 131 °F[3]
Accurate?
Cooling
Standard convection; optional air/water[3]
Accurate?
Compression ratio for N₂
2 x 10⁶[3]
Accurate?
Compression ratio for He
5 x 10²[3]
Accurate?
Compression ratio for H₂
2 x 10²[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
TURBOVAC 50 with DN 40 ISO-KF——Inlet flange DN 40 ISO-KF; pumping speed 33 l/s (N₂)ptbsales.com[4]
TURBOVAC 50 with DN 40 CF——Inlet flange DN 40 CF; pumping speed 33 l/s (N₂)ptbsales.com[4]
TURBOVAC 50 with DN 63 ISO-K——Inlet flange DN 63 ISO-K; pumping speed 55 l/s (N₂)ptbsales.com[4]
TURBOVAC 50 with DN 63 CF——Inlet flange DN 63 CF; pumping speed 55 l/s (N₂)ptbsales.com[4]
TURBOVAC 50 D2——Different high-vacuum port options: DN 40 KF, DN 40 CF, DN 63 ISO-K, DN 63 CF, DN 63 ISO-Kmanualslib.com[2]
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Pump TypeTurbomolecular pump with grease-lubricated bearings[2]
  • Ultimate pressure< 5 x 10⁻⁸ mbar[3]
  • Power consumption at ultimate pressure15 W[3]
  • Max. foreline pressure for N₂1 x 10⁻¹ mbar (7.5 x 10⁻² Torr)[3]
  • Recommended foreline pumpTRIVAC D 2.5 E[3]
  • Pumping speed for N₂ (DN 40 inlet)33 l/s[3]
  • Pumping speed for N₂ (DN 63 inlet)55 l/s[3]
  • Gas throughput for N₂ (DN 40 inlet)0.90 mbar l/s[3]
  • Gas throughput for N₂ (DN 63 inlet)1.00 mbar l/s[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the pumping speed of the Turbovac 50 for nitrogen?

For the DN 40 inlet versions, the pumping speed for nitrogen is 33 L/s. For the DN 63 inlet versions, it is 55 L/s.[4][3]

What is the ultimate pressure achievable?

The ultimate pressure is below 5 × 10⁻⁸ mbar (< 3.8 × 10⁻⁸ Torr).[3]

What is the nominal rotation speed and run-up time?

The nominal rotation speed is 72 000 rpm. The run-up time to 95 % of nominal speed is 2 minutes.[3]

What is the recommended forevacuum pump?

The recommended forevacuum pump is the Leybold TRIVAC D 2.5 E.[3]

Not publicly documented

The following facts about the Turbovac 50 Turbo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Turbovac 50 Turbo are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Turbovac 50 Turbo are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Turbovac 50 Turbo are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Turbovac 50 Turbo is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Turbovac 50 Turbo are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]manualslib.com — manualslib.commanualslib.com
  3. [3]uhvts.com — uhvts.comuhvts.com
  4. [4]ptbsales.com — ptbsales.comptbsales.com
Was this page accurate?

Last updated Sep 28, 2026.

Compare with similar tools

View all →