Lam Research
Rainbow 4400B SN2622-Parts
What it is
How it works
General reference — not yet source-verifiedProcess parameters such as gas composition, pressure, and RF power are controlled to achieve the desired etch rate and selectivity. Systems of this class often include automated tuning and endpoint detection to ensure repeatable results across wafers.
Where it fits in the process flow
General reference — not yet source-verifiedIn semiconductor fabrication, plasma etch systems are used after the photoresist pattern has been formed. The etch removes material from areas not protected by the resist. After etching, the remaining resist is stripped. The wafer then proceeds to downstream steps such as cleaning, inspection, and subsequent processing layers.
Applications
General reference — not yet source-verifiedPlasma etch systems are employed for etching a variety of materials including silicon, silicon dioxide, silicon nitride, and many metals. Applications span integrated circuit manufacturing, microelectromechanical systems (MEMS) fabrication, and other devices that require precise material removal at the micron and sub‑micron scale.
What do the numbers mean?
Wafer handling1
Configuration & options9
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Rainbow 4400B SN2622-Parts are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4400B SN2622-Parts are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 4400B SN2622-Parts are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 4400B SN2622-Parts are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4400B SN2622-Parts are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4400B SN2622-Parts is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]dealer listingsemistarcorp.com
Last updated Oct 11, 2026.
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