Lam Research
2300 Exelan Flex 45 Dielectric
What it is
How it works
The Lam 2300 Exelan Flex 45 employs high-density plasma technology to perform anisotropic etch of dielectric materials. The system generates plasma using radio-frequency (RF) power to etch features with precise profile control and selectivity.[3]
Where it fits in the process flow
General reference — not yet source-verifiedIn semiconductor fabrication, the dielectric etch step patterns contact holes, via holes, and trenches in insulating layers such as silicon dioxide and low-k dielectrics. The etch system processes wafers after deposition of the dielectric film and before subsequent metallization or barrier-layer deposition.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- 27 MHz RF generator not working
- Water flow error when using the other 2 RF generators
What do the numbers mean?
Power & electrical2
Wafer handling3
Gas & chemistry3
- With 12 gas lines[1]
Configuration & options2
- C4F8, CF4, O2, Ar, CO, CO2, O2, CHF3, HBr, N2, SF6, H2[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 2300 Exelan Flex 45 Dielectric are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 Exelan Flex 45 Dielectric are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 Exelan Flex 45 Dielectric are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 Exelan Flex 45 Dielectric are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 2300 Exelan Flex 45 Dielectric is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2300 Exelan Flex 45 Dielectric are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]globaltechsolutions.com.sg — globaltechsolutions.com.sgglobaltechsolutions.com.sg
Last updated Sep 22, 2026.
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