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KLA

Prometrix UV 1050 Thickness Measurement

KLA Prometrix UV 1050 Thickness Measurement family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The KLA Prometrix UV 1050 is a thin film measurement system. The KLA Prometrix UV 1050 uses broadband UV optics and dual beam spectrophotometry. The KLA Prometrix UV 1050 can measure over 500 discrete wavelengths simultaneously and has a stage resolution of xy 0.25µm and z 0.025µm.[1][2]

KLAPrometrix UV 1050 Thickness Measurement
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What it is

The Prometrix UV 1050 is a thin film measurement system manufactured by KLA-Tencor. The system is used for thickness measurement of films on semiconductor wafers.[3][1][2][4]

How it works

The UV 1050 employs broadband UV optics and dual beam spectrophotometry to measure reflectance across the spectrum. The system uses a broadband Xenon arc lamp as its light source and features automatic focus on the measurement site. An integrated color camera provides imaging of the measurement site.[1][2]

Where it fits in the process flow

The Prometrix UV 1050 is used for measuring polysilicon thickness, UV reflectivity, and simultaneous oxide and TiN thickness for chemical-mechanical planarization (CMP) applications.[1][2]

What do the numbers mean?

Wafer handling3

Wafer size
100 mm, 150 mm, 200 mm[1]
Accurate?
Wafer size (alternative)
4 inch, 6 inch, 8 inch[3]
Accurate?
Wafer sizes
100mm, 150mm, 200mm (4, 6, 8 inch)[1]
Accurate?

Optics & imaging6

Stage resolution (xy)
0.25 µm[1]
Accurate?
Stage resolution (z)
0.025 µm[1]
Accurate?
Imaging system
Color camera[1]
Accurate?
Measurement capability
Simultaneous multilayer and ESML measures over 500 discrete wavelengths[1]
Accurate?
Stage resolution
xy - 0.25µm, z - 0.025µm[1]
Accurate?
Measurement principle
Broadband UV optics and dual beam spectrophotometry[1]
Accurate?

Control & software3

Operating system
Windows NT[1]
Accurate?
Software
Summit with GUI[1]
Accurate?
Software
Summit Software with GUI[1]
Accurate?

Configuration & options2

Focus
Automatic focus on measurement site[1]
Accurate?
Light source
Broadband Xenon Arc Lamp[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the KLA Prometrix UV 1050 support?

The Prometrix UV 1050 supports wafer sizes of 100 mm, 150 mm, and 200 mm (also noted as 4, 6, and 8 inch).[3][1][2][4]

What light source does the Prometrix UV 1050 use?

The system uses a broadband xenon arc lamp as its light source.[1][2]

What applications is the Prometrix UV 1050 suited for?

Applications include polysilicon measurement, UV reflectivity, and simultaneous oxide and TiN thickness measurement for CMP processes.[1][2]

Not publicly documented

The following facts about the Prometrix UV 1050 Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Prometrix UV 1050 Thickness Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Prometrix UV 1050 Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Prometrix UV 1050 Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Prometrix UV 1050 Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Prometrix UV 1050 Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]classoneequipment.com — classoneequipment.comclassoneequipment.com
  2. [2]KLA-Tencor Prometrix UV-1050 — wotol.comwotol.com
  3. [3]Equipment inventory listing
  4. [4]https://www.ptwsingapore.com/img/products/prometrix_uv1050_970171uv1050/prometrix_uv1050_970171uv1050.pdf — ptwsingapore.comptwsingapore.com
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Last updated Sep 28, 2026.

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