KLA
OmniMap RS 55 TCA Resistivity Mapper
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA OmniMap RS 55 TCA Resistivity Mapper is a resistivity measurement tool for 8-inch wafers. The KLA OmniMap RS 55 TCA uses a KLA H2D robot. The KLA OmniMap RS 55 TCA runs software version ST-6.50.[1][2]
What it is
The KLA OmniMap RS 55 TCA is a resistivity mapper designed for measuring the electrical resistance of thin films on semiconductor wafers. The system is manufactured by KLA (formerly KLA-Tencor). The OmniMap RS 55 TCA handles eight-inch wafers. The tool is equipped with a KLA H2D robot for wafer handling. The system runs software version ST-6.50.[1][3][2]
What do the numbers mean?
Wafer handling3
Control & software1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the OmniMap RS 55 TCA Resistivity Mapper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OmniMap RS 55 TCA Resistivity Mapper are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the OmniMap RS 55 TCA Resistivity Mapper are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the OmniMap RS 55 TCA Resistivity Mapper are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the OmniMap RS 55 TCA Resistivity Mapper are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the OmniMap RS 55 TCA Resistivity Mapper is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Inventory photo
Last updated Oct 10, 2026.
Compare with similar tools
View all →The ABM-407B-2-S-CE-S293 is a robot.