KLA
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The KLA Filmetrics F40 is a microscope-based thin-film measurement instrument that uses spectral reflectance technology to measure thickness and optical constants. The F40 can achieve a measurement spot size as small as 1 µm when attached to a microscope. The F40 is available in several configurations (F40, F40-UV, F40-EXR, F40-NIR, F40-UVX, F40-XT) with different wavelength and thickness ranges.[1][2]
The F 40 includes an integrated live video camera coupled with microscope optics to produce a measurement spot size as small as 1 µm.[1]
A step-through calibration for each objective lens provides precise absolute reflectance across the spectrum, enabling thickness accuracy and measurement of refractive index.[2]
In semiconductor fabrication, the F 40 measures photoresist, oxides, nitrides, silicon, and other semiconductor films.[2][3]
Additional applications include biomedical device coatings, MEMS thin film filters, liquid crystal display layers, and OLED film stacks.[2][3]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| F40 | — | — | Wavelength range 400–850 nm, thickness range 20 nm–40 µm (5X objective) | kla.com[2] |
| F40-UV | — | — | Wavelength range 190–1100 nm, thickness range 4 nm–40 µm (5X objective) | kla.com[2] |
| F40-EXR | — | — | Wavelength range 400–1700 nm, thickness range 20 nm–150 µm (2X objective) | kla.com[2] |
| F40-NIR | — | — | Wavelength range 950–1700 nm, thickness range 100 nm–120 µm (5X objective) | kla.com[2] |
| F40-UVX | — | — | Wavelength range 190–1700 nm, thickness range 4 nm–120 µm (5X objective) | kla.com[2] |
| F40-XT | — | — | Wavelength range 1440–1690 nm, thickness range 0.4 µm–250 µm (2X objective) | kla.com[2] |
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The F 40 can produce a film thickness measurement spot size as small as 1 μm.[2]
The F40 model (400–850 nm) has a thickness range of 20 nm to 45 μm with a 10X objective.[2]
The F 40 is used in semiconductor fabrication, biomedical devices, MEMS, and liquid crystal displays.[2][3]
The F 40 requires a computer with a processor clock speed of 1.4 GHz minimum, a USB 2.0 interface, and operating system of PC Windows 10 to the latest Windows (64-bit) or MAC OS X Catalina to the latest MAC OS running Parallels.[2]
The following facts about the F 40 Thin Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F 40 Thin Film Thickness Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the F 40 Thin Film Thickness Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F 40 Thin Film Thickness Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F 40 Thin Film Thickness Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F 40 Thin Film Thickness Measurement are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Sep 26, 2026.
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