Hitachi
UA 7200
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Hitachi UA 7200 is an asher. The UA 7200 handles 6-inch wafers. The UA 7200 was introduced in 1998.[1]
What is it?
What do the numbers mean?
Wafer handling1
Configuration & options2
Vintage & configurations
- 1998Production start[1]
Introduced in 1998
Where are the manuals?
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Not publicly documented
Field notes
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Not publicly documented
The following facts about the UA 7200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the UA 7200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UA 7200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the UA 7200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the UA 7200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the UA 7200 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Oct 2, 2026.