Filmetrics
F60-t
What it is
The Filmetrics F60-t is an automated film thickness mapping instrument designed for production environments. The F60-t series builds on the Filmetrics F50 platform by adding features tailored for continuous manufacturing, such as automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, and an industrial computer with pre-installed software.[1][3]
The F60-t instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths are required to measure thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.[1]
How it works
The F60-t employs spectral reflectance technology, using a built-in light source, spectrometer, and motorized R-Theta stage. The system automatically moves to preset measurement points and completes film thickness and refractive index measurements within seconds. An automatic on-board baselining feature automatically performs spectral baseline calibration before each measurement to ensure consistency during long-term continuous operation.[1][3]
The F60-t includes a library with over one hundred thirty materials pre-loaded and offers free software updates. The system can be upgraded to fully robotic wafer handling and supports the SECS/GEM factory automation software protocol for integration with manufacturing execution systems.[1][3]
Where it fits in the process flow
The F60-t is designed for use on production lines, where it can be integrated into automated wafer handling and factory communication systems to provide in-line or near-line film thickness measurements. The enclosed measurement stage and automatic notch finding allow the machine to operate with minimal operator intervention.[1][3]
Applications
Applications also include hardcoats, metals, ophthalmics, parylene, PCBs and PWBs, solar photovoltaic coatings, thick resist, and vacuum coatings. The instrument generates two- and three-dimensional thickness uniformity maps of the measured wafers.[1]
- production environments
What do the numbers mean?
Optics & imaging9
Performance1
Control & software1
Configuration & options18
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| F60-t | — | — | Base model listed with 20nm-50µm thickness range and 380-1050nm wavelength range. | web.archive.org[1] |
| F60-t-UV | — | — | 10nm-50µm thickness range and 200-1100nm wavelength range. | web.archive.org[1] |
| F60-t-NIR | — | — | 100nm-250µm thickness range and 950-1700nm wavelength range. | web.archive.org[1] |
| F60-t-EXR | — | — | 20nm-250µm thickness range and 380-1700nm wavelength range. | web.archive.org[1] |
| F60-t-UVX | — | — | 10nm-250µm thickness range and 200-1700nm wavelength range. | web.archive.org[1] |
| F60-t-XT | — | — | 10µm-1mm thickness range and 1590-1650nm wavelength range. | web.archive.org[1] |
| F60-s980 | — | — | Configuration stated with 4µm-1mm thickness range and 960-1000nm wavelength range. | kla.com[2] |
| F60-t-s1310 | — | — | Configuration stated with 7µm-2mm thickness range and 1280-1340nm wavelength range. | unicorn-tech.com[3] |
| F60-t-s1550 | — | — | Configuration stated with 10µm-3mm thickness range and 1520-1580nm wavelength range. | unicorn-tech.com[3] |
What replaced it?
Related models
- siblingFilmetrics F50— The F60-t family maps film thickness and index just like the F50 products.source[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the standard thickness measurement range of the F60-t?
The standard F60-t model covers a thickness range of 20 nm to 50 µm with a wavelength range of 380 to 1050 nm. Other models extend the range: F60-t-UV covers 10 nm to 50 µm at 200 to 1100 nm; F60-t-NIR covers 100 nm to 250 µm at 950 to 1700 nm; F60-t-EXR covers 20 nm to 250 µm at 380 to 1700 nm; F60-t-UVX covers 10 nm to 250 µm at 200 to 1700 nm; and F60-t-XT covers 10 µm to 1 mm at 1590 to 1650 nm.[1]
Does the F60-t support SECS/GEM communication?
Yes, the F60-t supports the SECS/GEM factory automation software protocol, enabling direct communication with a factory's manufacturing execution system (MES) for automated measurement task issuing and data upload.[3]
What wafer sizes can the F60-t accommodate?
The system supports 4 inch, 6 inch, and 200 mm wafers as standard, and 300 mm chucks are available as an optional accessory.[1]
Not publicly documented
The following facts about the F60-t are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F60-t are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the F60-t are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F60-t are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F60-t is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F60-t are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]kla.com — kla.comkla.com
- [3]unicorn-tech.com — unicorn-tech.comunicorn-tech.com
- [4]Filmetrics F60-t Film Thickness Mapper Brochure Download | Unicorn — unicorn-tech.comunicorn-tech.com
- [5]Filmetrics® F60-t Thin Film Thickness Mapping System - Automatic Thickness Mapping System - Yingbo Scientific instruments (Shanghai) co. LTD — ybsemi-solution.comybsemi-solution.com
Last updated Sep 24, 2026.