Filmetrics
The Filmetrics 4PP is a characterization tool at the Stanford Nanofabrication Facility that is used for sheet resistance measurement. The Filmetrics 4PP is located in the SNF Paul G Allen L107 Cleanroom and is assigned to the 'All' cleanliness group. The Filmetrics 4PP requires 1.00 hours of training.[1][2]
A four-point-probe sheet resistance tool measures the lateral resistance of a thin film by making electrical contact through four probes rather than two.
The four-point-probe method is used to separate the measured film resistance from contact effects that can distort simpler two-probe measurements.
The Filmetrics 4PP is used for sheet resistance measurement of thin conducting and semiconducting films.[1]
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A two-point probe measures resistance including contact resistance between the probe and sample, which can dominate for high-resistance samples. A four-point probe separates current and voltage paths, allowing accurate measurement of sheet resistance independent of contact resistance.
Probe spacing is a key factor in converting measured voltage and current to sheet resistance. Standard correction factors exist for common geometries. The probe spacing must be known accurately for precise results, and some systems allow interchangeable probe heads with different spacings for different sample sizes.
No, a four-point probe measures sheet resistance. To obtain resistivity, the sample thickness must be known from another measurement (e.g., profilometry, ellipsometry). Conversely, if resistivity is known, sheet resistance can be used to infer thickness of uniform layers.
The following facts about the 4PP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4PP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 4PP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 4PP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 4PP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 4PP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 5, 2026.