EV Group
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The EVG 420 Mask Aligner is a mask alignment tool manufactured by EV Group. The EVG 420 Mask Aligner can only align wafers and includes no exposure optics. The EVG 420 Mask Aligner handles wafers up to 6 inches in size.[1]

Mask aligners operate by bringing a photomask into proximity or contact with a wafer coated with photoresist. An alignment microscope and stage controls position the mask relative to the wafer. After alignment, ultraviolet light is projected through the mask to expose the photoresist.
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The following facts about the 420 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 420 Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 420 Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 420 Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 420 Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 420 Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 5, 2026.
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.