ENI

DCG 100

Deposition ENI DCG 100 family

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DCG 100 — Inventory photo — Fig. 01DCG 100Inventory photo^[1]

What it is

The ENI DCG 100 is a DC plasma generator used as semiconductor manufacturing equipment.^[1]^[2]

How it works

General reference — not yet source-verified

A DC plasma generator provides direct-current electrical power to create and sustain a plasma in process equipment.

A generator of this class serves as a power source for plasma-based process chambers and is typically controlled to deliver the electrical conditions needed for plasma ignition and maintenance.

Where it fits in the process flow

General reference — not yet source-verified

A DC plasma generator sits in the utility and process-power side of a plasma tool rather than as a wafer-handling subsystem.

A generator of this class supports plasma-based deposition and related vacuum-process steps by supplying energy to the chamber in which the process occurs.

Applications

General reference — not yet source-verified

A DC plasma generator is used in plasma-assisted semiconductor processes that require a stable direct-current plasma source.

A generator of this class can support deposition-related vacuum processing and other plasma-driven thin-film steps.

What do the numbers mean?

Power & electrical10

Input: 200-208 V, 35 A, 50-60 Hz^[1]
Output: 10 kW^[1]; 200-208v 3ph 48-62hz^[2]; 200-208v 3ph 50-60hz^[2]
Output Power: 10 kW^[1]
Input Voltage: 200-208 V^[1]
Input Frequency: 50-60 Hz^[1]
Input Phase: 3-phase^[2]
Max Input Current (48-62 Hz): 40 A^[2]
Max Input Current (50-60 Hz): 60 A^[2]

Configuration & options6

PN: DCG 2 M-A 041300110 AL^[1]; 40a Max Input^[2]; 60a Max Input^[2]
Input Current: 35 A^[1]
Part Number: DCG 2 M-A 041300110 AL^[1]
Vintage Year (unit-specific): 2000^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Input200-208 V, 35 A, 50-60 Hz^[1]
Output10 kW^[1]
Configuration200-208v 3ph 48-62hz^[2]
Configuration200-208v 3ph 50-60hz^[2]
Output Power10 kW^[1]
Input Voltage200-208 V^[1]
Input Frequency50-60 Hz^[1]
Input Phase3-phase^[2]
Max Input Current (48-62 Hz)40 A^[2]
Max Input Current (50-60 Hz)60 A^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the ENI DCG 100?

The ENI DCG 100 is a DC plasma generator.^[1]^[2]

Not publicly documented

The following facts about the DCG 100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DCG 100 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DCG 100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DCG 100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DCG 100 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DCG 100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report