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Edwards

XDS 10 Scroll

Edwards XDS 10 Scroll family
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The Edwards XDS 10 is an oil-free dry scroll vacuum pump that uses a patented bearing shield to isolate the vacuum environment from lubricants. The Edwards XDS 10 provides a maximum displacement of 13.4 m³/h at 60 Hz and an ultimate total pressure of 6×10⁻² mbar. The Edwards XDS 10 features an adjustable three-position gas-ballast control for pumping condensable vapors.[1][2]

XDS 10 Scroll — Inventory photo
Fig. 01XDS 10 ScrollInventory photo[3]

Power

11.3 m³/h[1]

Vacuum

35 mbar[1]

What it is

The Edwards XDS 10 is a dry scroll vacuum pump.[4][5][1]

The XDS 10 is a member of the Edwards XDS series of dry scroll pumps.[4][1]

How it works

A patented bearing shield isolates the vacuum environment from all forms of lubricant, making the pump both dry and hermetically sealed.[1]

Applications

The XDS 10 is used in applications including scanning electron microscopes, ion implanters, sputtering systems, leak detectors, glove boxes, freeze drying, and general clean pumping tasks.[1]

The XDS 10 is designed for pumping condensable vapors and uses materials selected for a wide range of laboratory wet chemistry applications.[1]

The pump is used for automotive, beam lines and high energy physics, centrifuges, coating, cryogenics, degassing, distillation, extraction, filtration, freeze drying, furnaces, gel drying, laboratory bench top vacuum, lasers, rare gas re-circulation, refrigeration, research and development, rotary and centrifugal evaporators, surface science instruments, and solvent recovery.[5]

What do the numbers mean?

Power & electrical6

Maximum displacement (50 Hz)
11.3 m³/h[1]
Accurate?
Maximum displacement (60 Hz)
13.4 m³/h[1]
Accurate?
Ultimate vacuum (total pressure, 60 Hz)
6×10⁻² mbar / 4.5×10⁻² Torr[1]
Accurate?
Motor power
0.3 kW[1]
Accurate?
Noise level
55 dB(A) at 1 m (50 Hz)[1]
Accurate?
Motor rotational speed (60 Hz)
1730 rpm[2]
Accurate?

Vacuum & pumping1

Maximum water vapor inlet pressure
35 mbar[1]
Accurate?

Dimensions & facilities2

Weight
24.5 kg (54 lb)[1]
Accurate?
Dimensions (LxWxH)
427 x 290 x 249 mm[2]
Accurate?

Configuration & options4

Inlet connection
NW25 (KF25)[1]
Accurate?
Outlet connection
NW25 (KF25)[1]
Accurate?
Vibration
<4.5 mm/s (rms)[1]
Accurate?
Operating temperature range
10 °C to 40 °C[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Edwards XDS 10 (1-phase 115/230 V, North America)——Single-phase motor configured for 115 V or 230 V supply, pre-set to 115 V for North America; part number A72601906.idealvac.com[1]
Edwards XDS 10 (1-phase 115/230 V, Europe/UK)——Single-phase motor configured for 115 V or 230 V supply, pre-set to 230 V for Europe/UK; part number A72601903.idealvac.com[1]
Edwards XDS 10 (1-phase 100/200 V, Japan)——Single-phase motor configured for 100 V or 200 V supply, pre-set to 200 V for Japan; part number A72601904.idealvac.com[1]
Edwards XDS 10 (3-phase 200/380/415/460 V)——Three-phase motor, voltage configurable to 200–230 V or 380–460 V, pre-set to 380–460 V; part number A72601905.idealvac.com[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Maximum displacement (50 Hz)11.3 m³/h[1]
  • Maximum displacement (60 Hz)13.4 m³/h[1]
  • Ultimate vacuum (total pressure, 60 Hz)6×10⁻² mbar / 4.5×10⁻² Torr[1]
  • Motor power0.3 kW[1]
  • Noise level55 dB(A) at 1 m (50 Hz)[1]
  • Motor rotational speed (60 Hz)1730 rpm[2]
  • Maximum water vapor inlet pressure35 mbar[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the displacement of the Edwards XDS 10 at 60 Hz?

The displacement of the Edwards XDS 10 at 60 Hz operation is 13.4 m³h⁻¹.[1]

What is the ultimate vacuum of the Edwards XDS 10 at 60 Hz?

The ultimate vacuum of the Edwards XDS 10 at 60 Hz operation is 4.5 × 10⁻² Torr.[5][1]

What is the weight of the Edwards XDS 10?

The weight of the Edwards XDS 10 is 54 lb.[5][1]

What are the available motor voltages for the Edwards XDS 10?

Available motor voltages include 115-120/230-240 V for single-phase 60 Hz, 200-230/380-460 V for three-phase 60 Hz, and 100/200 V for single-phase 50 Hz.[5][1][4]

What type of inlet and exhaust connections does the Edwards XDS 10 use?

The Edwards XDS 10 uses KF25 connections for both the inlet and exhaust.[5]

Not publicly documented

The following facts about the XDS 10 Scroll are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XDS 10 Scroll are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the XDS 10 Scroll are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XDS 10 Scroll are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XDS 10 Scroll is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the XDS 10 Scroll are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]idealvac.com — idealvac.comidealvac.com
  2. [2]idealvac.com — idealvac.comidealvac.com
  3. [3]Inventory photo
  4. [4]EDWARDS XDS 10 INSTRUCTION MANUAL Pdf Download | ManualsLib — manualslib.commanualslib.com
  5. [5]Edwards XDS 10 Scroll Pump | Rebuilt | Provac Sales — provac.comprovac.com
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Last updated Sep 24, 2026.

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