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Edwards

XDS 10 Dry Scroll

Edwards XDS family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

XDS 10 Dry Scroll — Inventory photo
Fig. 01XDS 10 Dry ScrollInventory photo[1]

What is it?

What do the numbers mean?

Power & electrical2

Voltage
200-230 V[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?

Configuration & options1

Current
2.0-2.1 A[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage200-230 V[1]
  • Frequency50/60 Hz[1]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

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Not publicly documented

Field notes

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Frequently asked questions

What is the Edwards XDS 10?

It is a dry scroll pump.[1]

What are the identified make and model?

The make is Edwards and the model is XDS 10.[1]

Not publicly documented

The following facts about the XDS 10 Dry Scroll are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XDS 10 Dry Scroll are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XDS 10 Dry Scroll are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XDS 10 Dry Scroll are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XDS 10 Dry Scroll are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XDS 10 Dry Scroll is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]XACTIX Xetch System Manual — nanofab.utah.edunanofab.utah.edu
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Last updated Jul 29, 2026.

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