Waferpedia

Edwards

PD3

Vacuum coating systemEdwards PD3 family
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PD3 — web.archive.org
Fig. 01PD3web.archive.org[1]

What is it?

The PD3 plate degasser is described as suitable for degassing photographic films and plates prior to their use in electron microscopes, with benefits including reduced pump-down times and less contamination to the microscope column. The sources describe a large-capacity stainless steel chamber, hinged door with elastomer seal, mounting on a BOC Edwards direct-drive vacuum pump, NW fittings, and the ability to add chambers to increase capacity.

What can it run?

Process applications and technology nodes documented for this tool.

  • Degassing photographic films and plates
  • Use prior to electron microscopy

What do the numbers mean?

Power & electrical1

Electrical supply
Supplied complete with electrical mains cable and on/off switch[2]
Accurate?

Vacuum & pumping6

Pump
Mounted on standard BOC Edwards direct-drive vacuum pump[1]
Accurate?
Vacuum gauge
Provided[2]
Accurate?
Chamber mounting
Can be mounted horizontally or vertically above the rotary pump[2]
Accurate?
Pump model
Standard two-stage BOC Edwards RV3 rotary vane pump[2]
Accurate?
Pump characteristics
Quiet running and vibration free[2]
Accurate?
Pump feature
Fitted with a gas ballast valve to assist in removing water vapour[2]
Accurate?

Wafer handling1

Application chamber suitability
Designed to accommodate the largest photographic films and plates normally used in electron microscopes, including the Philips EM400 complete double cassette[2]
Accurate?

Configuration & options7

Chamber material
Stainless steel[1]
Accurate?
Chamber size
164 x 164 x 340 mm[1]
Accurate?
Capacity
Chambers can be added to increase capacity[1]
Accurate?
Door
Hinged door with elastomer seal[1]
Accurate?
Fittings
Fitted with NW fittings for versatility[1]
Accurate?
Floor area
Uses small floor area[1]
Accurate?
Air admittance valve
Provided[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • PumpMounted on standard BOC Edwards direct-drive vacuum pump[1]
  • Vacuum gaugeProvided[2]
  • Chamber mountingCan be mounted horizontally or vertically above the rotary pump[2]
  • Pump modelStandard two-stage BOC Edwards RV3 rotary vane pump[2]
  • Pump characteristicsQuiet running and vibration free[2]
  • Pump featureFitted with a gas ballast valve to assist in removing water vapour[2]
  • Electrical supplySupplied complete with electrical mains cable and on/off switch[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the PD3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PD3 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the PD3 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the PD3 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the PD3 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the PD3 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
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Last updated Sep 22, 2026.