Edwards
EPX 180 NE
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Edwards EPX 180 NE is a dry vacuum pump used in semiconductor manufacturing. The Edwards EPX 180 NE has a pumping speed of 106 CFM and an ultimate vacuum of less than 7x10^-5 Torr. The Edwards EPX 180 NE includes an integrated display and control panel.[1][2]
What it is
The Edwards EPX 180 NE is a dry vacuum pump intended for use in semiconductor manufacturing applications. The pump is part of the Edwards EPX N series, which is a line of dry vacuum pumps. The EPX N series pumps are equipped with a nitrogen purge system for process compatibility.[3]
The Edwards EPX 180 NE dry pump uses an integrated display and control panel. The pump has an ISO63 inlet and a KF25 exhaust. The pumping speed is 106 CFM and the ultimate vacuum is less than 7 x 10^-5 Torr. The pump weighs 104 lbs.[1]
How it works
The Edwards EPX 180 NE includes pump protection sensors and LED status indicators to monitor pump conditions. The pump can be controlled and monitored through an End User Controller (EUC) and a Pump Display Terminal (PDT), which provide menus for operation, status, control, and setup functions.[3]
What do the numbers mean?
Power & electrical3
Vacuum & pumping3
Gas & chemistry1
Control & software1
Dimensions & facilities1
Configuration & options2
Vintage & configurations
- 2008Vintage year[2]
Unit manufactured in 2008
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the pumping speed of the Edwards EPX 180 NE?
The Edwards EPX 180 NE has a pumping speed of 106 CFM.[1]
What is the ultimate vacuum of the Edwards EPX 180 NE?
The Edwards EPX 180 NE has an ultimate vacuum of less than 7 x 10^-5 Torr.[1]
What are the inlet and exhaust connection sizes for the Edwards EPX 180 NE?
The Edwards EPX 180 NE has an ISO63 inlet and a KF25 exhaust.[1]
Does the Edwards EPX 180 NE have a nitrogen purge system?
Yes, the Edwards EPX 180 NE is part of the EPX N series, which includes a nitrogen purge system.[3]
What applications is the Edwards EPX 180 NE used for?
The Edwards EPX 180 NE is used in semiconductor applications including ash/strip and ion implant end station applications.[1]
Not publicly documented
The following facts about the EPX 180 NE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the EPX 180 NE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EPX 180 NE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EPX 180 NE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EPX 180 NE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the EPX 180 NE are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]provac.com — provac.comprovac.com
- [2]fab-spares.com — fab-spares.comfab-spares.com
- [3]Edwards EPX180NE Manuals | ManualsLib — manualslib.commanualslib.com
- [4]Equipment inventory listing
Last updated Sep 24, 2026.
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