Disco
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The Disco dicing saw is a semiconductor dicing tool capable of handling up to 8 inch substrates. The Disco dicing saw uses a 2” front-mount spindle with closed-loop control and a pattern recognition system for auto-focusing.[1]
Disco dicing equipment is a wafer separation tool used to cut semiconductor substrates into individual devices after front-end fabrication. The equipment class belongs to the packaging and backend portion of semiconductor manufacturing, where processed wafers are separated for later assembly.
The Cornell DISCO tool uses a front-mount spindle with air drive and closed-loop control. The tool also uses a closed-loop Y-axis linear encoder, non-contact optical height sensing, and a pattern recognition system with auto-focusing and programmable illumination.[1]
The Cornell tool is used with all-purpose and silicon-only blade schedules, which indicates use for different substrate and cut requirements. The tool is also used for dicing silicon, bonded silicon wafers, and glass.[1]
Dicing equipment is used for semiconductor wafer singulation and for cutting other microelectronic substrates that are processed in wafer form. The class is also used with support tapes that hold the substrate during separation and later pickup.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| DAD3220 | — | — | Automatic dicing saw with auto-alignment, auto-focus, auto-kerf check, 4 cutting channels with 320 degree max rotating angle, cutting blades thickness 100-400 micron, max substrate size 6” wafers or 6”x6” substrates, 160mm x 162mm cutting range, <0.005/160 positioning accuracy, 1.5 kW spindle at 30,000 per minute. | ece.utoronto.ca[3] |
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The tool can handle substrates up to 8 inches in size.[3]
The maximum substrate thickness is 1.25 mm.[3]
The tool is compatible with Class A and B metals and compounds, but does not allow GaAs substrates.[3]
Dicing tape holds the wafer or die together during cutting, and is mounted to a thin metal frame for support.[4]
The following facts about the Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dicing are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Dicing are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Dicing are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Dicing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Dicing are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 6, 2026.
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