Disco
DFL 7560 L
What it is
The DFL 7560 L is a fully automatic system. The system handles workpieces up to 150 mm in diameter. The DFL 7560 L includes robot wafer handling. The system features a touch panel LCD monitor. The DFL 7560 L uses linear scale closed loop control on the X and Y axes. The Z axis has a positional repeatability of 0.002 mm. The dimensions of the DFL 7560 L are 2000 mm by 1810 mm by 1800 mm. The system weighs approximately 3300 kg.[1][3]
How it works
The DFL 7560 L incorporates a laser power supply with built-in water cooled chillers. An external chiller unit supplies cooling water to the laser power supply. A separate chiller unit provides cooling water to the X axis. The system uses a high and low magnification microscope with LED illumination for alignment. The X and Y axes use linear scale closed loop control for positioning.[1]
Applications
What do the numbers mean?
Power & electrical7
Wafer handling10
- Chuck for 200mm wafers[1]
- New robot design for handling heavier wafers[1]
- Wafer size
- New CE marking 6 inch Lens and new Galvo Scanner Sapphire wafer deposited in stocker[1]
- Optional Upgrade
- 200 mm Fully Automatic wafer handling from/to standard wafer cassette, Chuck for 200mm wafers, New robot design for handling heavier wafers, 6 inch Lens and new Galvo Scanner[1]
Optics & imaging2
- Low and High Magnification microscope with LED illumination[1]
Performance2
- Z axis positional repeatability 0.002mm Options: 1[1]
Control & software3
- X and Y axis with linear scale closed loop control[1]
Dimensions & facilities4
- Chiller unit to supply cooling water to X axis[1]
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 200mm Fully Automatic wafer handling from/to standard wafer cassette | — | — | Machine modification includes 200mm fully automatic wafer handling from/to standard wafer cassette, chuck for 200mm wafers, new robot design for handling heavier wafers, new CE marking, 6 inch lens, and new Galvo Scanner. | Equipment inventory listing[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationStep-down Transformer 400 V, 3 phases, 50 Hz[1]
- ConfigurationLaser power supply with built in water cooled chillers[1]
- ConfigurationChiller unit to supply cooling water for Laser power supply[1]
- Uninterruptible Power Supply1[1]
- Power SupplyStep-down Transformer 400 V, 3 phases, 50 Hz[1]
- Laser CoolingLaser power supply with built in water cooled chillers[1]
- Additional ChillerChiller unit to supply cooling water for Laser power supply[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the DFL 7560 L are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFL 7560 L are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the DFL 7560 L are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DFL 7560 L are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DFL 7560 L is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the DFL 7560 L are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]web.archive.org — disco.co.jp (Feb 22, 2020)web.archive.org
Last updated Oct 2, 2026.
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