Disco
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Wafer size
100mm
Vacuum
2.3 to 11.8 MPa[2]
The DCS1440 is an automatic cleaning system manufactured by Disco Corporation. The DCS1440 is designed to clean workpieces that have been cut on a dicing saw. The DCS1440 is a manual-load system that supports Φ3- to 8-inch tape frames. The DCS1440 can accommodate square workpieces up to 250 x 250 mm as an option. The DCS1440 features a 4-inch LCD touch panel for operation.[2][3]
The DCS1440 uses a rotating table and one or two cleaning arms. The table rotates at speeds from 100 to 3000 min⁻¹. The cleaning arm sweep speed and cleaning locations are configurable. The system offers a standard high-pressure cleaning nozzle and an optional atomizing cleaning nozzle. The atomizing nozzle generates a mist by mixing fluid droplets with accelerated air; this mist collides with the surface at high speed, creating shockwaves that clean with minimal damage. Cleaning and drying times can be set from 0 to 999 seconds. The cleaning range is Φ365 mm.[2][3]
The DCS1440 is used for cleaning singulated dies and wafer pieces after dicing. The DCS1440 can process workpieces mounted on tape frames from 3 to 8 inches. The optional atomizing nozzle enables cleaning of delicate structures with reduced damage. The double cleaning arm configuration allows simultaneous use of both high-pressure and atomizing nozzles for versatile cleaning.[2][3]
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The system includes a standard high-pressure cleaning nozzle; an optional atomizing cleaning nozzle is available, and both nozzle types can be mounted simultaneously in a double cleaning arm configuration.[2][3]
The table rotation speed range is 100 to 3000 min⁻¹. The cleaning nozzle sweep speed range is 1 to 37.5 °/sec.[2][3]
The following facts about the DCS1440 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DCS1440 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DCS1440 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DCS1440 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DCS1440 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DCS1440 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 25, 2026.
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