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Denton Vacuum

CC-105

Ion sourceDenton Vacuum CC-105 family
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The Denton Vacuum CC-105 is a broad beam cold cathode ion source. The Denton Vacuum CC-105 is designed for ion-assisted evaporation processes (IAD). The Denton Vacuum CC-105 has an ion source aperture of 37 mm.[1][2]

CC-105 — web.archive.org
Fig. 01CC-105web.archive.org[1]

Power

+800 V peak[2]

Gas delivery

O2, Ar, N2, others[2]

What it is

The Denton Vacuum CC-105 is a broad beam cold cathode ion source.[1][2][3]

The CC-105 is designed for ion-assisted evaporation processes.[1][2][3]

The CC-105 is incorporated as a base subsystem on optical coating plants made by Denton Vacuum and is also offered as a stand-alone subsystem.[1][3]

How it works

The CC-105 is a broad beam source with an ion source aperture of 37 mm.[2]

The CC-105 accepts O2, Ar, N2, and other gases.[2]

Where it fits in the process flow

The CC-105 is retrofit into many evaporation systems to extend them to ion-assisted deposition processes.[2]

Applications

The CC-105 is used for ion-assisted evaporation in optical coating processes.[1][3]

The CC-105 is used for reactive processes with oxygen or nitrogen.[2]

The CC-105 is also used for deposition processes involving hard carbon and hydrophobic materials.[2]

  • Ion-assisted evaporation (IAD) processes
  • Reactive processes utilizing oxygen or nitrogen
  • Optical coating systems

What do the numbers mean?

Power & electrical11

Plasma power supply output voltage
+800 V peak[2]
Accurate?
Plasma power supply output current
3.5 A peak[2]
Accurate?
Plasma power supply electrical connection
220 V (or 400 V)[2]
Accurate?
Plasma power supply size
19 in x 5 in high[2]
Accurate?
Neutralizer power supply output voltage
-30 V[2]
Accurate?
Neutralizer power supply output current
30 A[2]
Accurate?
Neutralizer power supply electrical connection
230 V[2]
Accurate?
Neutralizer power supply size
19 in x 1.75 in high[2]
Accurate?
Plasma power supply electrical connection
220 (or 400) V[2]
Accurate?
Plasma power supply size
19" x 5" high[2]
Accurate?
Neutralizer power supply size
19" x 1.75" high[2]
Accurate?

Gas & chemistry1

Gases
O2, Ar, N2, others[2]
Accurate?

Configuration & options12

Ion source aperture
37 mm[2]
Accurate?
Ion drive current
0 - 3.5 A[2]
Accurate?
Ion energy
50 - 800 eV[2]
Accurate?
Ion source size
90 mm / 175 mm[2]
Accurate?
Compatibility
100% O2 compatible[1]
Accurate?
Design feature
Broad beam cold cathode ion source[1]
Accurate?
Designed for
Ion-assisted evaporation (IAD) processes[1]
Accurate?
Ion source type
Broad beam cold cathode ion source[1]
Accurate?
Designed for
Ion-assisted evaporation processes (IAD)[1]
Accurate?
Ion drive current
0 - 3.5 ampere[2]
Accurate?
Ion current density
High[1]
Accurate?
Maintenance
Easy maintenance[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • GasesO2, Ar, N2, others[2]
  • Plasma power supply output voltage+800 V peak[2]
  • Plasma power supply output current3.5 A peak[2]
  • Plasma power supply electrical connection220 V (or 400 V)[2]
  • Plasma power supply size19 in x 5 in high[2]
  • Neutralizer power supply output voltage-30 V[2]
  • Neutralizer power supply output current30 A[2]
  • Neutralizer power supply electrical connection230 V[2]
  • Neutralizer power supply size19 in x 1.75 in high[2]
  • Plasma power supply electrical connection220 (or 400) V[2]
  • Plasma power supply size19" x 5" high[2]
  • Neutralizer power supply size19" x 1.75" high[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What gases can the CC-105 ion source use?

The CC-105 can use O2, Ar, N2, and other gases.[2]

What is the ion energy range of the CC-105?

Ion energy is adjustable from 50 to 800 eV.[2]

What is the aperture size of the CC-105 ion source?

The ion source aperture is 37 mm.[2]

Not publicly documented

The following facts about the CC-105 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CC-105 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the CC-105 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the CC-105 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CC-105 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the CC-105 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]web.archive.org — web.archive.orgweb.archive.org
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Last updated Oct 5, 2026.