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CHA

Mark 50 C RH Vacuum

DepositionCHA Mark 50 C RH Vacuum family
Research Quality: 30% complete

The CHA Mark 50 C RH Vacuum Evaporator is a vacuum evaporation system. The CHA Mark 50 C RH Vacuum Evaporator operates on 3-phase 208 VAC, 50/60 Hz, 150 A. The CHA Mark 50 C RH Vacuum Evaporator includes an Edwards IH 80 dry pump and dual CTI 9600 compressors.[1]

Mark 50 C RH Vacuum — Inventory photo
Fig. 01Mark 50 C RH VacuumInventory photo[1]

Power

3 Phase, 208 VAC, 50/60 HZ, 150 A[1]

Vacuum

0-100 Psi[1]

What is it?

The CHA Mark 50 C RH Vacuum Evaporator is a vacuum evaporation system with a 3-phase 208 VAC power supply and dual CTI 9600 cryo compressors.

What do the numbers mean?

Power & electrical6

Phase
3 Phase, 208 VAC, 50/60 HZ, 150 A[1]
Accurate?
Power Supply
CHA SR 10 D 212[1]
Accurate?
Phase
3 Phase[1]
Accurate?
Voltage
208 VAC[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?
Power Supply
CHA SR 10 D 212 On-Board 40 Cryo Pump[1]
Accurate?

Vacuum & pumping5

Air
0-100 Psi[1]
Accurate?
Dry Pump
Edwards IH 80[1]
Accurate?
Air Pressure Range
0-100 Psi[1]
Accurate?
On-Board Cryo Pump Part Number
811214107[1]
Accurate?
On-Board Water Pump Part Number
8116135 G 001[1]
Accurate?

Configuration & options7

Water
9.25 GPM[1]
Accurate?
Compressor #1
CTI 9600[1]
Accurate?
Compressor #2
CTI 9600[1]
Accurate?
P/N
811214107[1]
Accurate?
P/N
8116135 G 001[1]
Accurate?
Current
150 A[1]
Accurate?
Water Flow Rate
9.25 GPM[1]
Accurate?

Observed configurations

How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.

Unit as listed[1]

  • 3 Phase, 208 VAC, 50/60 HZ, 150 A
  • Dry Pump: Edwards IH 80
  • Compressor #1: CTI 9600
  • Compressor #2: CTI 9600
  • Power Supply: CHA SR 10 D 212
  • On-Board 40 Cryo Pump: P/N 811214107
  • On-Board Waterpump: P/N 8116135 G 001
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase, 208 VAC, 50/60 HZ, 150 A[1]
  • Air0-100 Psi[1]
  • Dry PumpEdwards IH 80[1]
  • Power SupplyCHA SR 10 D 212[1]
  • Phase3 Phase[1]
  • Voltage208 VAC[1]
  • Frequency50/60 Hz[1]
  • Air Pressure Range0-100 Psi[1]
  • Power SupplyCHA SR 10 D 212 On-Board 40 Cryo Pump[1]
  • On-Board Cryo Pump Part Number811214107[1]
  • On-Board Water Pump Part Number8116135 G 001[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the electrical power requirement of the CHA Mark 50 C RH?

The system operates on three-phase, 208 V AC, 50/60 Hz, with a current draw of 150 A.[1]

Not publicly documented

The following facts about the Mark 50 C RH Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 50 C RH Vacuum are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Mark 50 C RH Vacuum are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Mark 50 C RH Vacuum are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Mark 50 C RH Vacuum are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Mark 50 C RH Vacuum is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Sep 24, 2026.

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