Cascade Microtech
Elite 300
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Cascade Microtech Elite 300 is a semi-automatic wafer probe station platform. The Elite 300 handles 12-inch wafers and includes MicroChamber, AttoGuard, and PureLine technologies. The Elite 300 also features a precision low-noise femtoguard temperature chuck.[1][2]
What it is
The Elite 300 is a semiautomatic probe station platform that supports twelve-inch wafers. The system includes a MicroChamber for environmental isolation, a nickel-plated aluminum chuck, and temperature control provided by an ATT C60-60 cooling unit and an ATT CMI temperature control unit. The station is equipped with an eVue III pro digital microscope and a ten-times Mitutoyo Plan Apo objective for alignment and inspection. The platform runs Velox 3.2 software.[4][1][2]
What do the numbers mean?
Wafer handling4
Optics & imaging1
Performance1
Control & software2
Configuration & options10
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| ELITE 300/AP | — | — | — | electronicsdatasheets.com[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What kind of machine is the Elite 300?
The Elite 300 is a probe station platform for semiconductor test and probe work.[1]
Not publicly documented
The following facts about the Elite 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Elite 300 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Elite 300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Elite 300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Elite 300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Elite 300 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]electronicsdatasheets.com — electronicsdatasheets.comelectronicsdatasheets.com
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]Inventory photo
Last updated Oct 7, 2026.