Brooks
Jet
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Brooks Jet is an atmospheric transport system (EFEM) that serves as the core automation subsystem for Brooks wafer handling systems. The Jet is the first EFEM designed at the system level, enabling fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes.[1]
What it is
General reference — not yet source-verifiedEquipment Front End Modules serve as the interface between wafer transport systems and process tools, enabling automated loading and unloading of wafer cassettes in atmospheric conditions.
How it works
The Jet functions as the core atmospheric automation subsystem for Brooks wafer handling systems. The system uses a flexible, modular architecture based on industry standards to allow fast set-up and integration.[1]
Where it fits in the process flow
The Jet is designed to enable customers to build process tools around a common core, facilitating seamless integration with existing fab equipment and processes.[1]
Applications
The Jet is used for wafer handling in semiconductor manufacturing, serving as the core atmospheric automation subsystem.[1]
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Brooks Jet?
The Brooks Jet is an atmospheric wafer transport system and the first Equipment Front End Module designed at the system level.[1]
What are the power requirements of the Brooks Jet Handler?
The Brooks Jet Handler operates on single-phase power at 50/60 Hz and 200-240 VAC.[2]
What type of architecture does the Jet system use?
The Jet features a flexible, modular architecture based on industry standards.[1]
What is the role of the Jet in semiconductor manufacturing?
The Jet serves as the core atmospheric automation subsystem for Brooks wafer handling systems, enabling fast set-up and seamless integration with fab equipment.[1]
Not publicly documented
The following facts about the Jet are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Jet are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Jet are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Jet are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Jet are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Jet is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]500 — brooks.com (Oct 1, 2018)web.archive.org
- [2]Inventory photo
Last updated Oct 1, 2026.
